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Self-aligned nucleation of gold onto templates with a nano-scale precision fabricated by scanning probe lithography

Paper ID Volume ID Publish Year Pages File Format Full-Text
26729 43973 2011 5 PDF Available
Title
Self-aligned nucleation of gold onto templates with a nano-scale precision fabricated by scanning probe lithography
Abstract

Nanostructures consisting of concentric Au circles with a nm-scale line thickness have been fabricated on silicon (Si) substrates based on electroless plating and by the use of scanning probe microscope as a lithographic tool. First, a micro-template was fabricated on a hexadecyl self-assembled monolayer (HD-SAM) covalently bonded to a Si(1 1 1) substrate by scanning probe anodization lithography in which the HD-SAM was locally degraded and the substrate Si was anodized along a trace of an conductive AFM-tip biased negatively to the grounded Si substrate. Anodic Si oxide formed by this local anodization process was then etched with HF in order to expose the Si surface under the anodic oxide layer. Consequently, a Si nanopattern surrounded with the HD-SAM identical to the anodic oxide pattern was formed. This Si nanopattern served as a template for fabricating a Au nanostructure by means of electroless plating. Due to the galvanic displacement of surface Si atoms with Au complex ions in a plating bath, Au started to nucleate on the exposed Si surface, while no nuclei was formed on the surrounding HD-SAM. Consequently, a Au nanostructure was formed through further Au deposition on the Au nuclei. The fabricated Au nanostructures are promising for applications emerging plasmonic functions.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► Concentric Au circles with a nm-scale line thickness have been fabricated on Si.

Keywords
Self-assembled monolayer; Scanning probe microscopy; Nanolithography; Electroless plating; Gold; Silicon
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Self-aligned nucleation of gold onto templates with a nano-scale precision fabricated by scanning probe lithography
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Publisher
Database: Elsevier - ScienceDirect
Journal: Journal of Photochemistry and Photobiology A: Chemistry - Volume 221, Issues 2–3, 25 June 2011, Pages 209–213
Authors
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Subjects
Physical Sciences and Engineering Chemical Engineering Bioengineering
Get Full-Text Now
Don't Miss Today's Special Offer
Price was $35.95
You save - $31
Price after discount Only $4.95
100% Money Back Guarantee
Full-text PDF Download
Online Support
Any Questions? feel free to contact us