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Nano-textured metallic surfaces for optical sensing and detection applications

Paper ID Volume ID Publish Year Pages File Format Full-Text
27314 44015 2009 9 PDF Available
Title
Nano-textured metallic surfaces for optical sensing and detection applications
Abstract

This work describes fabrication of three-dimensionally nano-textured silicon surface structures metalized by thin gold films, and their application for optical sensing and detection of solute molecules utilizing surface-enhanced Raman scattering (SERS) effect. Two types of sensitive surfaces were prepared by different techniques. The first of them was a checkerboard pattern of 3D nanoblocks defined in compact areas on the surface of a silicon wafer using highly accurate electron-beam lithography (EBL) technique, and fabricated by dry reactive-ion etching (RIE) technique with subsequent metalization of the surface by gold sputtering. The second type of sensitive surface consisted of a square array of nano-apertures, defined on a large area of the silicon surface by a less accurate but simpler ultraviolet holographic lithography, and subsequently fabricated in a sequence of dry and wet etching as well as gold sputtering steps. The fabricated structures were found to exhibit significant near-field enhancement, as evidenced by strong SERS signal from the sensors immersed in aqueous pyridine solutions with concentrations as low as 10−9 M due to the presence of well-defined 3D periodic texture of the structure.

Keywords
Metallic nano-structures; Plasmon; Surface-enhanced Raman scattering; Holographic lithography; Laser processing
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Publisher
Database: Elsevier - ScienceDirect
Journal: Journal of Photochemistry and Photobiology A: Chemistry - Volume 207, Issue 1, 5 September 2009, Pages 126–134
Authors
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Subjects
Physical Sciences and Engineering Chemical Engineering Bioengineering
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Price was $35.95
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