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Rapid prototyping of silica glass microstructures by the LIBWE method: Fabrication of deep microtrenches

Paper ID Volume ID Publish Year Pages File Format Full-Text
29042 44113 2006 6 PDF Available
Title
Rapid prototyping of silica glass microstructures by the LIBWE method: Fabrication of deep microtrenches
Abstract

We have constructed a system for surface-microstructuring transparent materials, such as silica glass, using laser-induced backside wet etching (LIBWE), which includes an excimer laser and a mask projection system. In this report, we describe the advantages of the LIBWE method and present various results showing deep microtrenches fabricated using this method. We examine the applicability of this method to rapid prototyping, and propose a mechanism for the formation of deep microtrenches.

Keywords
Silica glass; Surface-microstructuring; Nanosecond-pulsed UV laser; Microtrench; Rapid prototyping
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Rapid prototyping of silica glass microstructures by the LIBWE method: Fabrication of deep microtrenches
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Publisher
Database: Elsevier - ScienceDirect
Journal: Journal of Photochemistry and Photobiology A: Chemistry - Volume 182, Issue 3, 10 September 2006, Pages 319–324
Authors
, , , , ,
Subjects
Physical Sciences and Engineering Chemical Engineering Bioengineering
Get Full-Text Now
Don't Miss Today's Special Offer
Price was $35.95
You save - $31
Price after discount Only $4.95
100% Money Back Guarantee
Full-text PDF Download
Online Support
Any Questions? feel free to contact us