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Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics

Paper ID Volume ID Publish Year Pages File Format Full-Text
32117 44901 2013 25 PDF Available
Title
Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics
Abstract

•Review the recent advances in fabricating vertical nanostructure arrays (VNAs) by plasma etching processes.•Outline the advantages of plasma etching techniques.•Discuss the strategies in conjunction with microlithography or natural templates for constructing VNAs.•Summarize the VNAs-based applications.

SummaryPlasma etching, a conventional technique in semiconductor industry, has exhibited great potentials in fabricating nanoscale patterns by taking advantage of its high anisotropic nature and fine controllability. Thus far, various gas mixtures and chemistries have been practically developed for etching a wide variety of materials, including semiconductors, oxides, glass, metals and polymers, to fabricate a broad range of vertical nanostructure arrays (VNAs). In this review paper, we will summarize the recent achievements in fabricating VNAs by plasma etching processes and their applications in biology, energy and electronics. The strategies in conjunction with microlithography or natural templates for fabricating various VNAs are outlined and the VNAs-based applications in diverse fields such as DNA sensors, biomimetic structures, solar cells, gas sensors, SERS, drug delivery, and field emission will be discussed in detail. Finally, the perspective of future studies is proposed. The widespread applications of the VNAs provide the conventional process of plasma etching a new opportunity to strut in the forefront of materials science.

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Keywords
Vertical nanostructure arrays (VNAs); Plasma etching (reactive ion etching); Biology; Energy; Electronics
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Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics
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Publisher
Database: Elsevier - ScienceDirect
Journal: - Volume 8, Issue 3, June 2013, Pages 265–289
Authors
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Subjects
Physical Sciences and Engineering Chemical Engineering Bioengineering
Get Full-Text Now
Don't Miss Today's Special Offer
Price was $35.95
You save - $31
Price after discount Only $4.95
100% Money Back Guarantee
Full-text PDF Download
Online Support
Any Questions? feel free to contact us