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Trends in imprint lithography for biological applications

Paper ID Volume ID Publish Year Pages File Format Full-Text
37616 45376 2006 6 PDF Available
Title
Trends in imprint lithography for biological applications
Abstract

Imprint lithography is emerging as an alternative nano-patterning technology to traditional photolithography that permits the fabrication of 2D and 3D structures with <100 nm resolution, patterning and modification of functional materials other than photoresist and is low cost, with operational ease for use in developing bio-devices. Techniques for imprint lithography, categorized as either ‘molding and embossing’ or ‘transfer printing’, will be discussed in the context of microarrays for genomics, proteomics and tissue engineering. Specifically, fabrication by nanoimprint lithography (NIL), UV-NIL, step and flash imprint lithography (S–FIL), micromolding by elastomeric stamps and micro- and nano-contact printing will be reviewed.

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Publisher
Database: Elsevier - ScienceDirect
Journal: - Volume 24, Issue 7, July 2006, Pages 312–317
Authors
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Subjects
Physical Sciences and Engineering Chemical Engineering Bioengineering
Get Full-Text Now
Don't Miss Today's Special Offer
Price was $35.95
You save - $31
Price after discount Only $4.95
100% Money Back Guarantee
Full-text PDF Download
Online Support
Any Questions? feel free to contact us